Method and apparatus for quantitative structural analysis of sol

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

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250253, G01M 2300

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active

041467884

ABSTRACT:
In the proposed method a solid specimen is cleaved to obtain a pair of conjugate cleavage surfaces. Then, a scanning electron microscope is used to obtain images of the conjugate surfaces at a predetermined magnification. The images are superimposed to produce an image of a porous component of the solid structure. Thereafter, the image of the porous component is superimposed on each image of the conjugate surfaces to obtain a pair of images of imprints of solid grains. The image of pores and grain imprints is then converted to a contour form, all converted images are superimposed, and a contour image of the entire structure of the solid is obtained. The images of pores, grain imprints and complete structure of the solid are quantitatively analyzed with the aid of image analyzers, digitized and fed into a computer for calculation of the solid properties of interest, e.g., perviousness, using an appropriate program. Then, the direction of optimum pore image readout, corresponding to the direction of the structure's anisotropy, is determined by its spatial spectrum.
The proposed method can be effective with an apparatus comprising a scanning electron microscope with a TV monitor, an image video recorder, an additional TV monitor with a signal brightnes control, a light pen for marking images on the screens of the TV monitors, to ensure perfect matching of the superimposed images, a read/write memory module with image scale variation for transition from small to large images, an image mixing unit, and an image analyzer with a readout device interfaced with a universal computer.

REFERENCES:
patent: 4031391 (1977-06-01), Hoppe

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