Power system for inductively coupled plasma torch

Details Power system for inductively coupled plasma torch Power system for inductively coupled plasma torch

1987-03-06

1989-04-04

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511151, 21912136, H01J 724

Patent

active

048189162

ABSTRACT:
An induction plasma system comprises a torch and an induction coil. A sample substance is injected into the plasma at an axial position that is adjustable while the plasma is being energized. The plasma-forming gas flows through the induction coil prior to passing through the plasma torch. A piezoelectric crystal is used for initiating the plasma. An oscillator network generates radio frequency power at a first frequency, and an output LC network that includes the induction coil is tuned to a second frequency higher than the first frequency. Means for maintaining constant power to the plasma includes an AC circuit for duty cycling AC power input to a DC power supply in response to a feedback signal relative to the rectified voltage. Thus a change in the rectified voltage effects an inverse change in the duty cycling such as to nullify the change in the rectified voltage.

REFERENCES:
patent: 3958883 (1976-05-01), Turner
patent: 4225769 (1980-09-01), Wilkins

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