Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1995-05-09
1997-12-23
Chu, John S.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430171, 430176, 430191, 430192, 430193, 430909, 430910, G03F 7021, G03F 7023, G03F 7039, G03C 172
Patent
active
057006245
ABSTRACT:
The invention comprises an acid hardened resist system consisting of a resin binder having acid labile blocking groups and inert blocking groups and a photoacid generator. The inclusion of inert blocking groups on the resin improves shelf life without deleteriously affecting photolithographic properties of the resist.
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Ablaza Sheri L.
Denison Mark D.
Sinta Roger F.
Thackeray James W.
Chu John S.
Goldberg Robert L.
Shipley Company L.L.C.
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