Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1986-04-11
1989-04-04
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
136256, 136261, 156644, 156653, 156657, 156662, 357 30, 437 2, 437 92, H01L 21306, H01L 3100, B44C 122
Patent
active
048183377
ABSTRACT:
High efficiency, thin active-layer silicon solar cells and a process for their fabrications have been provided. The cells are characterized by a capability of employing a low-cost, metallurgical grade silicon for the substrate. The substrate has a silicon dioxide barrier coating with electrical conductivity to the active semiconductor layers provided by a multiplicity of fine holes through the oxide. The holes have silicon therein to afford electrical continuity between the active layers and the silicon of the substrate. The process comprises in situ formation of silicon dioxide on the silicon, formation of the holes in the oxide by photolithography, and etching enabling nucleation and growth of silicon in the holes by epitaxy.
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Barnett Allen M.
Mauk Michael G.
Powell William A.
University of Delaware
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