Process for producing a pattern with negative-type photosensitiv

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Finishing or perfecting composition or product

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Details

252156, 252528, 252529, 252541, 252547, 252548, 430301, 430326, G03C 500

Patent

active

048015199

ABSTRACT:
A developing solution comprising at least two compounds selected from choline and quaternary ammonium salts is suitable for developing a negative-type photosensitive resin composition with exposure to a smaller light amount.

REFERENCES:
patent: 4423138 (1983-12-01), Guild
patent: 4556629 (1985-12-01), Poulin et al.
patent: 4610953 (1986-09-01), Hashimoto et al.

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