X-ray generating device, and exposure apparatus and semiconducto

Details X-ray generating device, and exposure apparatus and semiconducto X-ray generating device, and exposure apparatus and semiconducto

1996-10-16

2000-03-14

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378122, G21K 500

Patent

active

060382791

ABSTRACT:
An X-ray generating device employing a laser-excited plasma light source has a plurality of luminescent points, or a luminescent portion the form of which is variable in terms of the configuration, size, position and the number of luminescent points. An object such as a mask is illuminated by X-rays generated from the light source under Kohler's illumination conditions. Also disclosed are an X-ray generating method using such a device, as well as a method of producing a semiconductor device.

REFERENCES:
patent: 4484339 (1984-11-01), Mallozzi
patent: 4896341 (1990-01-01), Forsyth
patent: 5394451 (1995-02-01), Miyake et al.
patent: 5444758 (1995-08-01), Miyake et al.
patent: 5503950 (1996-04-01), Miyake et al.
patent: 5581605 (1996-12-01), Murakami et al.

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