Surface characterization apparatus and method

Details Surface characterization apparatus and method Surface characterization apparatus and method

1990-10-31

1991-10-01

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504411, 2504421, 250400, 2504921, 250304, 250305, H01J 37305, G01F 137

Patent

active

050536257

ABSTRACT:
An apparatus for conducting surface characterizations of sample materials comprises an enclosure defining first and second substantially isolated operating chambers or regions. The operating regions are separated by narrow channels, and are preferably differentially pumped. An elongate substrate extends between the first and second regions. During operation, a sample surface to be studied is prepared on the substrate in the first region, is transported into the second region, and is analyzed thereat. In a preferred embodiment a continuous loop and pulley arrangement is provided, for the substrate. Also, for a preferred embodiment the first region is divided into first and second isolated chambers, through which the substrate is extended. A method is provided, whereby a surface can be prepared and analyzed. According to the method, the sample is applied to a substrate in a first region, and the substrate is transported into a second isolated region, through an elongate narrow channel. Differential pumping facilitates isolation of environments in the various regions.

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