Method of producing X-ray window

Details Method of producing X-ray window Method of producing X-ray window

1992-05-12

1993-11-02

Chaudhuri, Olik

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG68, 20419215, 20419225, 378 35, 2505051, 437 89, H01L 2120, C30B 2500

Patent

active

052580911

ABSTRACT:
An X-ray window having a diamond X-ray transparent film, diamond reinforcing crosspieces and a substrate on which the diamond X-ray transparent film has been grown. As reinforcing crosspieces are made of diamond, no thermal stress is generated between the X-ray transparent film and the crosspieces. This mask excels in flatness, transmittance of X-rays, and strength.

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patent: 5082359 (1992-01-01), Kirkpatrick
patent: 5146481 (1992-09-01), Garg et al.

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