Fishing – trapping – and vermin destroying
Patent
1987-07-16
1990-02-27
Hearn, Brian E.
Fishing, trapping, and vermin destroying
427 39, 118 501, 118620, 118728, 156643, 156646, H01L 3732
Patent
active
049046217
ABSTRACT:
A processing apparatus and method for performing a descum process (i.e. a process for removal of polymers and other organic residues) which uses a remote plasma, supplied through a distributor which includes a two-stage showerhead, to achieve improved results.
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Davis Cecil J.
Loewenstein Lee M.
Hearn Brian E.
Honeycutt Gary C.
Merrett Rhys
Pawlikowski Beverly A.
Sharp Melvin
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