SOI CMOS structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257351, H01L 2701

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active

057675490

ABSTRACT:
An integrated circuit is described incorporating a substrate, a layer of insulator, a layer of silicon having raised mesas and thin regions therebetween to provide ohmic conduction between mesas, electronic devices on the mesas, and interconnection wiring. The invention overcomes the problem of a floating gate due to charge accumulation below the channel of MOS FET's.

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