Methods of fabricating integrated, aligned tunneling tip pairs

Details Methods of fabricating integrated, aligned tunneling tip pairs Methods of fabricating integrated, aligned tunneling tip pairs

1992-04-14

1993-08-10

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

250307, G21K 510

Patent

active

052351874

ABSTRACT:
Self-aligned, opposed, nanometer dimension tips are fabricated in pairs, one of each pair being located on a movable, single crystal beam, with the beam being movable in three dimensions with respect to a substrate carrying the other tip of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers formed on the supporting beams. Spring means in each beam allow axial motion of the beam. The tips and beams are fabricated from single crystal silicon substrate, and the tips may be electrically isolated from the substrate by fabricating insulating segments in the beam structure.

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