Formation of thin-film patterns of a metal oxide

Details Formation of thin-film patterns of a metal oxide Formation of thin-film patterns of a metal oxide

1995-12-11

1997-05-20

Brunsman, David

Compositions: coating or plastic

Coating or plastic compositions

Heavy metal compound containing

10628719, 10628725, C23C 1814

Patent

active

056308728

ABSTRACT:
A composition for formation of thin-film patterns of a metal oxide which comprises a metal alkoxide and one or more nitro compounds selected from the group consisting of nitrobenzyl alcohol derivatives, nitrobenzaldehyde derivatives, nitrostyrol derivatives, nitroacetophenone derivatives, nitroanisole derivatives and nitrofuran derivatives. This composition is applied to a substrate which is then irradiated with light to perform patterning by utilizing the difference in solubility between the light-irradiated portion and the non-light-irradiated portion, attributed to the photodecomposition reaction of the irradiated portion. A photoreactive compound is added to a starting solution which contains an organic solvent and an organic metal compound, the solution is misted, and the resulting mist is deposited on a substrate while irradiating with light.

REFERENCES:
Soyama et al, CA 124:217495 "The formation of fine-patterned . . . " 1996.
Soyama et al, CA 124:133339 "Composition for formation . . . " Oct. 17, 1995.
Sasaki et al, CA 124:41509 "Composition for forming metal oxide thin film" Oct. 9, 1995.
Soyama et al, CA 123:304703 "Compositions for patterned . . . " Jul. 25, 1995.

Affiliated with

Also associated with

Rating

Formation of thin-film patterns of a metal oxide does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Formation of thin-film patterns of a metal oxide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Formation of thin-film patterns of a metal oxide will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1721363