Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1989-05-31
1990-07-10
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 20419216, 20419222, 20419223, 20419214, 20429802, 20429807, 20429828, 20429823, C23C 1434
Patent
active
049405233
ABSTRACT:
There is disclosed a process for coating fine powder of a metal, a ceramic, a plastic or an organic pigment with a metal or a ceramic comprising: (a) dispersing particles of said fine powder into primary particles by fluid jet mill treatment in an inert atmosphere; (b) heating the dispersed fine powder in an inert atmosphere under reduced pressure; (c) placing the heated powder in an evacuable rotary barrel sputtering chamber, forming a fluidized bed by rotating the barrel at a low speed and coating said fluidized powder by sputtering as the barrel is being rotated. By this process, fine powders of metals, ceramics and plastics having a particle diameter of 0.1-10 .mu.m can be uniformly coated by a metal or a ceramic. There is also provided an apparatus therefor.
REFERENCES:
patent: 4080281 (1978-03-01), Endo
patent: 4302311 (1981-11-01), Lowe et al.
Nisshin Steel Company Ltd.
Weisstuch Aaron
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