Method for the contactless measurement of the potential waveform

Details Method for the contactless measurement of the potential waveform Method for the contactless measurement of the potential waveform

1979-03-21

1980-09-02

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 2300

Patent

active

042208548

ABSTRACT:
A method for measuring the potential waveform in an electronic component by means of a scanning electron beam in which the pulse sequence of the primary electron beam contains alternatingly a pulse sequence with a fixed reference phase with respect to the potential pattern of the measuring voltage, and a pulse sequence with a measuring phase which can be shifted over a phase range, with the potential difference between the reference phase and the measuring phases measured, permitting the contactless measurement and a display of the potential pattern on a picture screen.

REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 3549999 (1970-12-01), Norton
patent: 3764898 (1973-10-01), Bohlen et al.
patent: 3956698 (1976-05-01), Malmberg et al.
"Quantitative Voltage Contrast at High Frequencies in The Sem," Balk et al., Scanning Electron Microscopy, 1976, pp. 615-624.

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