Scanning probe microscope and method of observing samples by usi

Details Scanning probe microscope and method of observing samples by usi Scanning probe microscope and method of observing samples by usi

1993-04-30

1995-05-09

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3700

Patent

active

054142601

ABSTRACT:
A scanning probe microscope is used to observe a sample. The same portion of a surface of the sample is scanned forward and backward using a probe. A first signal corresponding to a structure of the sample is detected from the probe during a period in which the probe scans the surface of the sample forward. A second signal corresponding to the structure of the sample is detected from the probe during a period in which the probe scans the surface of the sample backward. When a difference is caused in at least a portion between the first and second signals, the portion of one of the first and the second signals is replaced by a portion of the other signal to generate a corrected signal. An image of the sample is formed using the corrected signal.

REFERENCES:
patent: 4954704 (1990-09-01), Elings et al.
patent: 5051646 (1991-09-01), Elings et al.
patent: 5077473 (1991-12-01), Elings et al.
patent: 5107113 (1992-04-01), Robinson
patent: 5260572 (1993-11-01), Marshall

Affiliated with

Also associated with

Rating

Scanning probe microscope and method of observing samples by usi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe microscope and method of observing samples by usi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope and method of observing samples by usi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1707888