Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1992-08-21
1993-12-14
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
25049221, 250309, H01J 37305
Patent
active
052705528
ABSTRACT:
When a desired portion is separated from an integrated circuit chip or a semiconductor wafer, the portion is separated without dividing the chip or the wafer, so that the separated specimen can be moved to a desired position, and the separated specimen can be set to a desired attitude. Therefore, various analyses on the specimen through TEM, SEM, SIMS and so on can be carried out. A minute piece of specimen is cut and separated from the substrate of a specimen by use of a three-dimensional minute processing technique and a micro-manipulation technique. A surface of the specimen is subjected to an FIB processing from at least two kinds of angles, the separated specimen being mechanically connected to an external probe in a step for separating a part of the specimen including a portion to be analyzed. The separated specimen is supported by the probe, being moved. The separated specimen is subjected to analysis through TEM, SEM, SIMS, etc.
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Ishitani Tohru
Ohnishi Tsuyoshi
Anderson Bruce C.
Hitachi , Ltd.
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