Process for making metal oxides

Details Process for making metal oxides Process for making metal oxides

1994-07-26

1997-03-18

Bell, Janyce

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

4271263, 427226, 427240, 427380, 556 28, 556 31, 556 44, 556 64, 556 77, C07F 1900, B05D 512

Patent

active

056120826

ABSTRACT:
Metals are reacted in a first solvent, such as 2-methoxyethanol, to form an initial precursor comprising metal-oxide compounds dissolved in the first solvent. A second solvent, such as xylene, that does not react with the metal is added to the solution and the solution heated to distill away the first solvent and form a final precursor. The final precursor is spin-coated on an integrated circuit substrate then dried and annealed to form a thin film of a metal oxide. For metal oxides including bismuth, the bismuth precursor is added to a cold initial precursor and the final precursor is not heated after the bismuth precursor is added. The second solvent wets the substrate better than the first solvent and has a better viscosity for spin-coating, thus resulting in a denser thin film with fewer imperfections.

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