Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1978-12-05

1980-11-11

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, G01M 2300

Patent

active

042335108

ABSTRACT:
Two marks of variable positions are displayed in superposition on the image of a specimen. The distance between two points on the specimen corresponding respectively to the marks is calculated on the basis of the magnification of the image of the specimen. The distance thus calculated is multiplied by a predetermined coefficient.

REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.

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