Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1998-12-18
1999-11-30
Nazario-Gonzalez, Porfirio
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556136, 427587, 427593, C07F 108, C07F 1500, C23C 1600
Patent
active
059945710
ABSTRACT:
A Cu(hfac) precursor with a substituted ethylene ligand has been provided. The substituted ethylene ligand includes bonds to molecules selected from the group consisting of C.sub.1 to C.sub.8 alkyl, C.sub.1 to C.sub.8 haloalkyl, H, and C.sub.1 to C.sub.8 alkoxyl. One variation, the 2-methyl-1-butene ligand precursor has proved to be stable at room temperature, and extremely volatile at higher temperatures. Copper deposited with this precursor has low resistivity and high adhesive characteristics. Because of the volatility, the deposition rate of copper deposited with this precursor is very high. A synthesis method has been provided which produces a high yield of the above-described precursor.
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Charneski Lawrence J.
Evans David Russell
Hsu Sheng Teng
Nguyen Tue
Zhuang Wei-Wei
Maliszewski Gerald
Nazario-Gonzalez Porfirio
Ripma David C.
Sharp Laboratories of America Inc.
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