Scanning electron microscope with a chamber which can be broken

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports

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250441, G21K 510

Patent

active

043130569

ABSTRACT:
An electron microscope including a base, a frame supported by said base, a vacuum chamber supported by said frame and including a fixed cup-shaped member having a lateral aperture closed by a movable cover, the latter including a further interchangeable cup-shaped member with its concavity facing said aperture, and supported by substantially horizontal guide means rigid with said frame for moving from and towards said fixed cup-shaped member; support means being provided inside said further cup-shaped member for supporting a piece holder in an adjustable position.

REFERENCES:
patent: 408830 (1943-05-01), Borries et al.
patent: 2627580 (1953-02-01), Picard

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