Photosolubilizable composition with silyl ether or silyl ester c

Details Photosolubilizable composition with silyl ether or silyl ester c Photosolubilizable composition with silyl ether or silyl ester c

1987-04-30

1989-03-28

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430190, 430191, 430192, 430272, 430280, 430914, 430916, 430919, 430920, 430925, G03C 1495

Patent

active

048163759

ABSTRACT:
A photosolubilizable composition contains both a compound capable of producing an acid by irradiation with actinic rays and a compound which has at least one silyl ether or silyl ester group capable of being decomposed by an acid; optionally, a compound having at least one silyl ether group has at least one hydrophilic group, providing for increased solubility in a developing solution under the action of an acid, thus enhancing the photosensitivity and the development latitude of the composition.

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Research Disclosure, #13147, 3/1975, pp. 52-55.

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