Method of measuring surface topography by using scanning electro

Details Method of measuring surface topography by using scanning electro Method of measuring surface topography by using scanning electro

1988-11-22

1990-03-27

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, H01J 3728

Patent

active

049123130

ABSTRACT:
Disclosed is a method and apparatus for measurement of surface topography of a sample by using a scanning electron microscope, in which: secondary electrons released from the sample are detected by detectors which are four or an integral multiple of four in number and which are disposed above the sample to surround the sample; differential coefficients in two directions perpendicularly intersecting each other at the scanning point are obtained from the detected signals; the differential coefficients are successively summing-integrated along the two directions thereby obtaining surface topography of the sample; and at the same time the calculation expression for calculating the surface topography is corrected with the sample table inclined.

REFERENCES:
patent: 3597607 (1971-08-01), Campbell et al.
patent: 4600539 (1986-07-01), Ichihashi et al.
patent: 4725730 (1988-02-01), Kato et al.
patent: 4803357 (1989-02-01), Brust
Lebiedzik et al., Scanning Electron Microscopy/1975, (Part I), Apr. 1975, pp. 181-187.
Journal of Electron Microscopy, vol. 34, No. 4, pp. 328-337, (1985), "Measurement of Surface Topography Using SEM with Two Secondary Electron Detectors" By Tadao Suganuma.
Japanese Journal of Applied Physics, vol. 27, Aug. 1988, pp. 1508-1515, "Collection Efficiency Calculation in the Weak Electric Field Limit of Scanning Electron Microscopes (SEM) and Its . . . " by Makoto Kato.
"The Scanning Electron Microscope, Part 1, The Instrument", by S. W. Catley, F.R.S., Section 4.5.4, Cambridge University Press, 1972.

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