Preparation method for amorphous superlattice alloys

Details Preparation method for amorphous superlattice alloys Preparation method for amorphous superlattice alloys

1989-10-13

1991-05-14

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419212, 20419216, 20429827, C23C 1434

Patent

active

050153528

ABSTRACT:
A method for preparation of amorphous superlattice alloys consisting of lamellae based on periodic change in the composition by continuous conventional sputtering with a periodic change in the positions of substrates relative to a target or targets by rotating the substrate on a first axis and orbiting the substrate and first axis around a second axis parallel to the first axis.

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