Process for manufacture of integrated circuit device using organ

Details Process for manufacture of integrated circuit device using organ Process for manufacture of integrated circuit device using organ

1998-07-08

2000-11-07

Nelms, David

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438622, H01L 214763

Patent

active

061436437

ABSTRACT:
The invention relates to a process for forming an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises porous organic polysilica.

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