Radiant energy – Inspection of solids or liquids by charged particles
Patent
1996-09-26
1998-09-22
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
058118020
ABSTRACT:
A scanning probe microscope is disclosed which includes a pivotally mounted scanning assembly for scanning a surface of a sample. A sensing assembly is mounted relative to the scanning assembly and is positioned for sensing the surface topography of the sample. The scanning assembly includes a bore extending vertically through the scanning assembly which allows direct overhead viewing of the sensing assembly and the sample. The scanning assembly is pivotally mounted by a hollow pivot assembly which permits both the sensing assembly and the sample to be viewed through the scanning assembly when aligning the sensing assembly with the sample. The hollow pivot assembly also allows a user to optically view the sample from directly overhead with an optical microscope or charge coupled device.
REFERENCES:
patent: 5291775 (1994-03-01), Bamble et al.
patent: 5294804 (1994-03-01), Kajimura
patent: 5298975 (1994-03-01), Khoury et al.
patent: 5319960 (1994-06-01), Gamble et al.
patent: 5406832 (1995-04-01), Gamble et al.
patent: 5406833 (1995-04-01), Yamamoto
patent: 5408094 (1995-04-01), Kajimura
patent: 5440920 (1995-08-01), Jung et al.
patent: 5467642 (1995-11-01), Hosaka et al.
patent: 5508517 (1996-04-01), Onuki et al.
patent: 5616916 (1997-04-01), Handa et al.
patent: 5675154 (1997-10-01), Lindsay et al.
LandOfFree
Scanning probe microscope with hollow pivot assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning probe microscope with hollow pivot assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope with hollow pivot assembly will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1624402