Position control method position control apparatus, and semicond

Details Position control method position control apparatus, and semicond Position control method position control apparatus, and semicond

1996-07-09

1997-12-09

Font, Frank G.

Optics: measuring and testing

By alignment in lateral direction

356400, 356401, G01B 1100

Patent

active

056965907

ABSTRACT:
A position detection error generated due to the response delay of a position measuring device is corrected so as to essentially improve the relative position alignment performance of a moving member. In a position control method for controlling a moving member 15 (25) to target positions generated at predetermined periods, the current position of the moving member is measured by a position measuring device 16 (26), and a value corresponding to the detection error of the current position of the moving member due to the detection delay of the position measuring device is subtracted, as a correction amount O.sub.w (O.sub.r) of the current position of the moving member, from the value of a target position command signal X.sub.w (X.sub.r).

REFERENCES:
patent: 4326805 (1982-04-01), Feldman
patent: 4579453 (1986-04-01), Makita
patent: 4659227 (1987-04-01), Sato et al.
patent: 4717257 (1988-01-01), Kaneta et al.

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