4. Optics: measuring and testing
  5. By polarized light examination
  6. With light attenuation

Yoshinori Makita

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Data storage device and error recovery method

Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
Reexamination Certificate

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Method and apparatus for detecting a mark position

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Position control method position control apparatus, and semicond

Optics: measuring and testing – By alignment in lateral direction
Patent

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Temperature adjusting system in exposure apparatus

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1223323

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