Semiconductor integrated circuit device and a manufacturing meth

Details Semiconductor integrated circuit device and a manufacturing meth Semiconductor integrated circuit device and a manufacturing meth

1994-08-29

1997-02-18

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257306, H01L 27108, H01L 2976, H01L 2994, H01L 31119

Patent

active

056043651

ABSTRACT:
A semiconductor integrated circuit device having a DRAM consisting of memory cells, comprises; a first conductive film deposited over the main surface of a semiconductor substrate and used to form a gate electrode of a memory cell selection MISFET; a second conductive film deposited over the first conductive film and used to form bit lines to transfer data of a memory cell to a sense amplifier; a third conductive film deposited over the second conductive film and used to form a storage node of a capacitor; a fourth conductive film deposited over the third conductive film and used to form a plate electrode of the capacitor; and a fifth conductive film deposited over the fourth conductive film and used to form an interconnect, wherein a transistor in a direct peripheral circuit arranged close to a memory array is electrically connected, through a pad layer formed of the third conductive film, to the interconnection of the fifth conductive film deposited over the fourth conductive film, thereby allowing the aspect ratio of the contact hole formed over the pad layer to be reduced.

REFERENCES:
patent: 4873559 (1989-10-01), Shimizu et al.
patent: 5235199 (1993-08-01), Hamamoto et al.

Affiliated with

Also associated with

Rating

Semiconductor integrated circuit device and a manufacturing meth does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor integrated circuit device and a manufacturing meth, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor integrated circuit device and a manufacturing meth will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1603701