Magneto-optical disk

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Patent

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Details

20419226, 2041922, 428694DF, 428694NF, 428694AM, 428800, 428 643, 360 59, 360114, 360131, 360135, 365122, 369 13, G11B 566, C23C 1400

Patent

active

056038143

ABSTRACT:
A method of making a magneto-optical disk. A first AlGeN dielectric film is formed by reactive sputtering on a substrate. Two targets, one of aluminum and one of germanium, are used in the sputtering in a mixed atmosphere having at least nitrogen gas. Alternatively, a single target using an aluminum germanium alloy can be used. A magnetic film is formed on top of this dielectric film. A second dielectric film is then formed on top of the magnetic film. An adhesive film is formed on top of the second dielectric film and a second substrate adhered thereto.

REFERENCES:
patent: 5055353 (1991-10-01), Yamamoto
patent: 5283133 (1994-02-01), Tsutsumi

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