Method of and system for exposing pattern on object by charged p

Details Method of and system for exposing pattern on object by charged p Method of and system for exposing pattern on object by charged p

1998-08-12

2000-05-02

Gray, David M.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 2504922, G03B 2742, G03B 2754, A61N 500

Patent

active

060579072

ABSTRACT:
Before figure data are expanded into a bitmap, a checksum is calculated in unit of bitmap data corresponding to a cell stripe of scanning over which continuous exposure is possible. When the checksum is calculated after expanding the data into the bitmap, the interim calculation result of refocus values is used. In exposure, exposing k number of sub rectangular areas by repeating a sub scanning k number of times, jumping a deflection by a main deflector toward an center of remaining sub rectangular areas whose number is (p-k) inside a main rectangular areas and exposing remained (p-k) number of the sub rectangular areas by repeating the sub scanning (p-k) times after the jumping is settled. In an amplifier & low pass filter for supplying a drive voltage to a sub deflector, the cutoff frequency is lowed during flyback in a sawtooth waveform without changing an amplification factor.

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