Measurement system for a semiconductor manufacturing line in whi

Details Measurement system for a semiconductor manufacturing line in whi Measurement system for a semiconductor manufacturing line in whi

1997-09-15

2000-05-02

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324760, G01R 3102

Patent

active

060576979

ABSTRACT:
A measurement system for a semiconductor manufacturing line for measuring at least one wafer, which has gone through a specified manufacturing process includes a plurality of checking parts and a robot for conveying the wafer between the checking parts. After being loaded by the robot, the wafer goes through each checking part, and is then unloaded. The measurement apparatus is connected to a control part which is interfaced with each checking part so that when the measurement of the wafer is completed at a certain checking part, the wafer is conveyed to another checking part and to the unloading portion.

REFERENCES:
patent: 4856904 (1989-08-01), Akagawa
patent: 5166603 (1992-11-01), Hoshi

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