Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-09-27
1992-04-21
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
369101, 250307, G01N 2300
Patent
active
051071126
ABSTRACT:
A scanning tunnel-current-detecting device comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample, is provided.
REFERENCES:
patent: 4481616 (1984-11-01), Matey
patent: 4668865 (1987-05-01), Gimzewski et al.
patent: 4831614 (1989-05-01), Duerig et al.
"High-stability bimorph scanning tunneling microscope", Blackford et al., Rev. of Sci. Inst., vol. 58, No. 8, Aug. 87, pp. 1343-1348.
G. Binnig et al., "Scanning tunneling microscopy", (1982) Helvetica Physica vol. 55 pp. 726-735.
Kawade Hisaaki
Sakai Kunihiro
Yanagisawa Yoshihiro
Anderson Bruce C.
Canon Kabushiki Kaisha
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