Method for manufacturing ceramic material having piezo-electric

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430198, 430330, G03C 540

Patent

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048761796

ABSTRACT:
A method for manufacturing piezo-electric ceramic materials having predetermined acoustic impedance, wherein internal cavities are generated by a photolithographic process, utilizing a foil stack of green ceramic foils.

REFERENCES:
patent: 3615457 (1971-10-01), Seibert et al.
patent: 4555285 (1985-11-01), Chance et al.

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