Methods for producing polybenzoxazol precursors and correspondin

Details Methods for producing polybenzoxazol precursors and correspondin Methods for producing polybenzoxazol precursors and correspondin

1996-03-19

1997-11-18

Kulkosky, Peter F.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

528149, 528182, 528183, 528482, G03C 1492

Patent

active

056886314

ABSTRACT:
Methods for producing solutions of polybenzoxazol precursors that are soluble in alkali and resist solutions based on such precursors. A dicarboxylic acid halogenide is reacted with a bis-(o-aminophenol) in an organic solvent and in the presence of a polymer with a tertiary N atom, which is insoluble in the solvent. Excess polymer and hydrohalogenide are separated from the reaction solution. The reaction solution is optionally mixed with a photoactive component.

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patent: 4332883 (1982-06-01), Ahne et al.
patent: 4339521 (1982-07-01), Ahne et al.
patent: 5021320 (1991-06-01), Mueller et al.
patent: 5104768 (1992-04-01), Sassmannhausen
patent: 5391465 (1995-02-01), Feely

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