Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1996-02-22
1997-11-18
Breneman, R. Bruce
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419234, 20419236, 505728, 505783, H01L 3900
Patent
active
056883838
ABSTRACT:
A method for decreasing the microwave surface impedance of high-temperature superconducting thin films comprises (a) applying, preferably by spin-coating, a protective coating (preferably poly(methyl methacrylate) or polyimide) to the surface of a high-temperature superconducting thin film, such as Tl.sub.2 Ba.sub.2 CaCu.sub.2 O.sub.8 ; (b) exposing the coated thin film to low angle ion milling at an incident angle of 5.degree. to 30.degree. (preferably 10.degree. to 20.degree.) relative to the surface of the coated film; and (c) optionally including the step of removing any residual protective coating from the surface of the thin film, such as by exposure to an oxygen plasma.
REFERENCES:
patent: 4966885 (1990-10-01), Hebard
patent: 5091048 (1992-02-01), Thomas
patent: 5270294 (1993-12-01), Wu et al.
patent: 5342828 (1994-08-01), Kountz et al.
patent: 5350499 (1994-09-01), Shibaike et al.
Goodyear, S.W. et al, IEEE Transactions on Applied Supercnductivity, 5(2), 3143-3146 (1995).
DiLorio, M.S. et al, Appl. Phys. Lett, 67(13), 1926-1928 (1995).
Shen, Z. et al, IEEE Transactions on Microwave Theory and Techniques, 40(12), 2424-2432 (1992).
Williams, R. E., Gallium Arsenide Processing Techniques, Chapter 9, Artech House (1984).
Suzuki, T. et al, Proceedings of the Sixth Inter. Symp. on Superconductivity, Oct. 1993.
Shen, Z., High Temp Superconducting Microwave Circuits, Chapter 2, Artech House (1994).
Nagai, Y. et al, Japanese Journal of Applied Physics, 30(11A), 2751-2755 (1991).
Manuscript: Marathe, A.P. et al, "Process Issues and Components for HTS Digital Integrated Circuit Fabrication", Oct. 17, 1994.
Manuscript: Wilker, C. et al, "A Sapphire Resonator for Microwave Characterization of Superconducting Thin Films", Aug. 24, 1992.
Holstein, W.L. et al, Materials Research Society Symposium Proceedings, vol. 275, pp. 241-x346 (1992).
Holstein, W.L. et al, 1992 Appl. Superconductivity Conf., (Aug. 1992).
Adjodha Michael E.
Breneman R. Bruce
E. I. Du Pont de Nemours and Company
LandOfFree
Method for improving the performance of high temperature superco does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for improving the performance of high temperature superco, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for improving the performance of high temperature superco will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1562898