Method and device for verifying that a given insulative element

Details Method and device for verifying that a given insulative element Method and device for verifying that a given insulative element

1996-03-28

1997-07-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324751, 324 711, H01J 37256

Patent

active

056506201

ABSTRACT:
A method of verifying that a given insulative element conforms with a reference insulative element, comprising the steps of: emitting a primary beam of electrons impinging on the given insulative element, receiving a secondary beam of electrons returned by the given insulative element in response to emission of the primary beam of electrons, and comparing a curve as a function of time of the electrical current of the secondary beam received with a curve as a function of time of a reference electrical current to establish whether or not the given insulative element conforms to a reference insulative element.

REFERENCES:
patent: 4745362 (1988-05-01), Brust
patent: 5281909 (1994-01-01), Brust

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