Optical scanning system utilizing an atomic force microscope and

Details Optical scanning system utilizing an atomic force microscope and Optical scanning system utilizing an atomic force microscope and

1995-11-29

1997-07-22

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, G01B 734

Patent

active

056506147

ABSTRACT:
A light-scattering optical system is incorporated in an AFM instrument for a large sample. The instrument is equipped with an optical microscope. Incident light is introduced into the optical microscope to provide a dark field. The incident angle to the surface of a sample is made variable. The incident light is introduced into the main enclosure of the AFM through two optical fibers. Light reflected from the surface of the sample is received by a detector split into two parts. The dark field microscope is automatically brought to focus in response to signals from the detector. The whole apparatus is enclosed in a sound-insulating dark box to enhance the S/N during detection of scattered light.

REFERENCES:
patent: 5117110 (1992-05-01), Yasutake et al.
patent: 5177559 (1993-01-01), Batchelder et al.
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5426302 (1995-06-01), Marchman et al.
patent: 5496999 (1996-03-01), Linker et al.

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