Surface microscope

Details Surface microscope Surface microscope

1990-06-05

1991-07-30

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3700

Patent

active

050361961

ABSTRACT:
A surface microscope includes a device which brings a probe close to a surface of a sample to scan it therewith for producing a tunnel current between the probe and the sample to measure the superficial shape of the sample by detecting the tunnel current. A device for varying a gap between the probe and the sample, a system for detecting a variable component of the tunnel current varying, accompanied by variations in the gap by the device for varying same, a divider for calculating the ratio of the variable component of the tunnel current to the tunnel current, and a calculator for calculating tunnel barrier information, based on the quotient obtained by the divider, are combined with a display for displaying the measured superficial shape of the sample and the tunnel barrier information thus calculated.

REFERENCES:
patent: 4343993 (1982-08-01), Binning et al.
patent: 4747698 (1988-05-01), Wickramasinghe et al.
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4870352 (1989-09-01), Koechner
Physical Review Letters, vol. 49, No. 1, Jul. 5, 1982, pp. 57-61.

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