Scan and tilt apparatus for an ion implanter

Details Scan and tilt apparatus for an ion implanter Scan and tilt apparatus for an ion implanter

1993-12-22

1995-04-11

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25049221, H01J 3720

Patent

active

054060885

ABSTRACT:
An improved scan and tilt apparatus for an ion implanter wherein a wafer-receiving platen assembly is received on the end member of a multiple axis arm system which is operable to effect scanning motion of the wafer along a straight line which intercepts the wafer tilt axis in any tilt position of the platen assembly. The arm system includes a rail and linear bearing system which interconnects an input member with the end member of the arm system to restrict the scanning motion to a straight line.

REFERENCES:
patent: 3778626 (1973-12-01), Robertson
patent: 4745287 (1988-05-01), Turner
patent: 4975586 (1990-12-01), Ray
patent: 5003183 (1991-03-01), Nogami et al.
patent: 5046992 (1991-09-01), Tamai et al.
patent: 5052884 (1991-10-01), Igari
patent: 5077511 (1991-12-01), George
patent: 5229615 (1993-07-01), Brune et al.

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