Device for replacing electron microscope specimens

Details Device for replacing electron microscope specimens Device for replacing electron microscope specimens

1990-08-02

1991-08-13

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504411, 2504431, 2504401, H01J 3720

Patent

active

050398644

ABSTRACT:
A device for replacing an electron microscope specimen. The device moves a specimen holder from inside the atmosphere onto a specimen stage via a preliminary chamber, the stage being installed in the specimen chamber of the microscope. The device comprises a valve partitioning the preliminary chamber from the specimen chamber, a movable cylinder capable of being moved through the preliminary chamber into the specimen chamber, a hermetic seal, and a lead wire connecting the specimen holder with a terminal. The cylinder has a cover at its front end. The terminal extends through the cover and is insulated from it. A specimen insertion rod is held by a mechanism mounted in the cover. When the cylinder is inserted close to the partition valve, the hermetic seal maintains the specimen chamber airtight.

REFERENCES:
patent: 2220973 (1940-11-01), Marton
patent: 3761709 (1973-09-01), Hasegawa et al.
Japanese Utility Model Laid-Open No. 62662/1984.

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