Oriented ferroelectric thin film element and process for prepari

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257310, 428620, 501 12, H01L 2976

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active

058348034

ABSTRACT:
An oriented ferroelectric thin film element, which comprises a single-crystal substrate having thereon (a) a first epitaxial or oriented ferroelectric thin film prepared by a gas phase growth method and (b) a second epitaxial or oriented ferroelectric thin film prepared by application of a coating solution of an organic metal compound to the first ferroelectric thin film followed by heating the coated material. The oriented ferroelectric thin film element has a smooth surface and is useful as an optical guide element, light modulation element, etc. The second ferroelectric thin film can be formed by repeating the process of application of a coating solution of an organic metal compound followed by heating the coated material several times. The present invention also discloses a process for preparing the oriented ferroelectric thin film element.

REFERENCES:
patent: 5011796 (1991-04-01), Bridger et al.
patent: 5206788 (1993-04-01), Larson et al.
patent: 5442585 (1995-08-01), Eguchi et al.
patent: 5567979 (1996-10-01), Nashimoto et al.
patent: 5645885 (1997-07-01), Nishimoto
patent: 5656382 (1997-08-01), Nashimoto
Nashimoto et al., "Epitaxial Growth of MgO on GaAs(001) for Growing Epitaxial BaTiO.sub.3 Thin Films by Pulsed Laser Deposition", Appl. Phys. Lett. 60 (10), Mar. 9, 1992, pp. 1199-1201.
Nashimoto et al., "Epitaxial LiNbO.sub.3 Thin Films Prepared by a sol-gel Process", Materials Letters, vol. 10, No. 7,8, Jan. 1991, pp. 348-354.

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