Atomic force microscope with integrated optics for attachment to

Details Atomic force microscope with integrated optics for attachment to Atomic force microscope with integrated optics for attachment to

1997-08-22

1999-09-14

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3726

Patent

active

059526572

ABSTRACT:
Atomic force microscope system is provided which is designed to be incorporated into or attachable to an objective lens which can be mounted on a lens turret of an optical microscope such that simultaneous atomic force microscopy and optical viewing of a sample through the objective lens can be performed. In one embodiment, the atomic force microscope (AFM) is designed to be removably attached to a standard objective lens of an optical microscope. In another embodiment, the AFM system is designed to be removably attached to an optical microscope and includes integrated optics for providing an optical view. In both embodiments, the optics are used solely for generating an optical view and/or other optical contrast mechanisms and are not used in conjunction with a detection mechanism of the AFM.

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