Water-soluble photoinitiators

Details Water-soluble photoinitiators Water-soluble photoinitiators

1995-07-14

1997-07-15

Lesmes, George F.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430296, 430311, 430313, 430325, 430326, 430330, 430921, 522 31, 522129, 522146, 522160, 522166, 522 88, G03C 1492, G03C 1494, G03C 500, C08F 246

Patent

active

056481969

ABSTRACT:
The present invention provides positive-tone and negative-tone photoresists including a photoinitiator comprising a compound of Formula (I): ##STR1## wherein R.sub.1 and R.sub.2 are independently selected from C.sub.1 -C.sub.6 alkyl; n is a number from 2 to 5, and An.sup.- is an anion. The photoinitiator comprising the compound of Formula (I) being soluble in water. Methods of preparing positive-tone and negative-tone photoresists are also provided.

REFERENCES:
patent: 4058400 (1977-11-01), Crivello
patent: 4136102 (1979-01-01), Crivello
patent: 4161478 (1979-07-01), Crivello
patent: 4175972 (1979-11-01), Crivello
patent: 4219654 (1980-08-01), Crivello
patent: 4238619 (1980-12-01), Crivello et al.
patent: 4273668 (1981-06-01), Crivello
patent: 4407759 (1983-10-01), Crivello
patent: 4417061 (1983-11-01), Crivello
patent: 4537854 (1985-08-01), Crivello
patent: 4610952 (1986-09-01), Crivello
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4882201 (1989-11-01), Crivello et al.
patent: 5034305 (1991-07-01), Nguyen-Kim et al.
patent: 5035979 (1991-07-01), Nguyen-Kim et al.
patent: 5045128 (1991-09-01), Landreth et al.
patent: 5073474 (1991-12-01), Schwalm et al.
patent: 5084371 (1992-01-01), Schwalm et al.
patent: 5130392 (1992-07-01), Schwalm et al.
patent: 5159088 (1992-10-01), Schwalm
patent: 5191124 (1993-03-01), Schwalm et al.
patent: 5216135 (1993-06-01), Urano et al.
patent: 5220037 (1993-06-01), Schwalm et al.
patent: 5260410 (1993-11-01), Schwalm
patent: 5262280 (1993-11-01), Knudsen et al.
patent: 5296332 (1994-03-01), Sachdev et al.
patent: 5314929 (1994-05-01), Crivello et al.
patent: 5318876 (1994-06-01), Schwalm et al.
patent: 5322765 (1994-06-01), Clecak et al.
patent: 5326675 (1994-07-01), Niki et al.
patent: 5532106 (1996-07-01), Frechet et al.
patent: 5532113 (1996-07-01), Frechet et al.
English Translation of JP-1-287558, Hirose, 1989.
E. Goethals et P. de Radzitzky; Reactions Du Sulfoxyde De Dimethyle, Bull. Soc. Chim. Belg. 73, pp. 546-559 (1964). Abstract.
E. Goethals et P. de Radzitzky; Reactions Du Sulfoxyde De Dimethyle, Bull. Soc. Chim. Belg. 73, pp. 579-584 (1964). Abstract.
S.A. MacDonald et al; Chemical Amplification in High-Resolution Imaging Systems, Acc. Chem. Res. 27 No. 6, pp. 151-158 (1994).
Jean M.J. Frechet; The photogeneration of acid and base within polymer coatings: Approaches to polymer curing and imaging, Pure & Appl. Chem. 64 No. 9, pp. 1239-1248 (1992).
Hiroshi Ito; Aqueous base developable deep UV resist systems based on novel monomeric and polymeric dissolution inhibtors, SPIE 920 pp. 33-41 (1988).
T. Sakamizu et al; Water-soluble onium salts--A new class of acid generators for chemical amplification positive resists, PMSE 72 pp. 199-200 (1995).
G. Pawlowski et al; Chemically Amplified Duv Photoresists Using a New Class of Photoacid Generating Compounds, SPIE 1262, pp. 16-25 (1990).
J. L. Dektar and N. P. Hacker; Triphenylsulfonium Salt Photochemistry. New Evidence for Triplet Excited State Reactions, J. Org. Chem. 53, 1833-1835 (1988).
J.V. Crivello; Initiators-Poly-Reactions-Optical Activity: Cationic Polymerization--Iodonium and Sulfonium Salt Photoinitiators, Advances in Polymer Science 62 pp. 1-48 (1984).
J.V. Crivello and J.H.W. Lam; Photoinititated Cationic Polymerization by Dialkyl-4-Hydroxyphenylsulfonium Salts, Journal of Polymer Science 18, pp. 1021-1034 (1980).
F.M. Houlihan et al; Synthesis of 4-(t-butoxycarbonyl)-2,6-dinitrobenzyl Tosylate, a Potential One Component Photoacid Generator and Dissolution Inhibitor Solubilizable Through Chemical Amplification, Polym. Mater. Sci. Eng. 66, pp. 38-40 (1992).
R. Schwalm; Success: A Novel Concept Regarding Photoactive Compounds, Proc. Polym. Mater. Sci. Eng. 61, pp. 278-282 (1989).

Affiliated with

Also associated with

Rating

Water-soluble photoinitiators does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Water-soluble photoinitiators, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Water-soluble photoinitiators will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1491551