Method and device of testing a semiconductor integrated circuit

Details Method and device of testing a semiconductor integrated circuit Method and device of testing a semiconductor integrated circuit

1999-04-26

2000-07-04

Gutierrez, Diego

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324752, 324760, G01R 3126

Patent

active

06084423&

ABSTRACT:
An ultrasonic wave beam producing device scans an ultrasonic wave beam 5 across a semiconductor integrated circuit chip 2 while detecting a voltage applied across the semiconductor integrated circuit chip 2 from a constant voltage source 1. In this way the semiconductor integrated circuit chip is tested without creating electron-hole pairs.

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