Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1998-03-20

2000-07-04

Berman, Jack

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256

Patent

active

060842385

ABSTRACT:
A scanning microscope is provided for producing a scan image at high spatial resolution and in a low acceleration voltage area. An acceleration tube is located in an electron beam path of an objective lens for applying a post-acceleration voltage of the primary electron beam. The application of an overlapping voltage onto a sample allows a retarding electric field against the primary electron beam to be formed between the acceleration tube and the sample. The secondary electrons generated from the sample and the secondary signals such as reflected electrons are extracted into the acceleration tube through the effect of an electric field (retarding electric field) immediately before the sample. The signals are detected by secondary signal detectors located upwardly than the acceleration tube.

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R.F.W. Pease, Low-Voltage Scanning Electron Microscopy, IEEE 9th Annual Symposium on Electron, Ion, and Laser Beam Technology, San Francisco Press, Inc., pp. 176-187.

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