Method of producing a polycrystalline alumina ceramic which is r

Details Method of producing a polycrystalline alumina ceramic which is r Method of producing a polycrystalline alumina ceramic which is r

1995-04-18

2000-07-04

Speer, Timothy M.

Plastic and nonmetallic article shaping or treating: processes

Outside of mold sintering or vitrifying of shaped inorganic...

264669, 264681, B32B 100

Patent

active

06083451&

ABSTRACT:
A polycrystalline alumina ceramic material which is resistant to a fluorine-comprising plasma is produced by forming a green body including alumina and a binder, and sintering the green body at a temperature ranging from about 1400.degree. C. to about 1700.degree. C. for a time from about 8 to about 12 hours. The area % of unsintered particles in the polycrystalline alumina ceramic material does not exceed 0.1 area %, resulting in reduced emission of particles from the material after exposure to plasma fluorine.

REFERENCES:
patent: 5260011 (1993-11-01), Wolter
U.S. application No. 08/353,774, Dyer et al., filed Dec. 12, 1994, "Plasma Fluorine Resistant Polycrystalline Alumina Ceramic Material and Method of Making".
U.S. application No. 08/601,372, Dyer et al., filed Feb. 14, 1996, "Plasma Halogen Resistant Polycrystalline Alumina Ceramic Material and Method of Making".

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