Scanning electron microscope and the like apparatus

Details Scanning electron microscope and the like apparatus Scanning electron microscope and the like apparatus

1989-02-16

1990-01-09

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3728, H01J 37244

Patent

active

048930091

ABSTRACT:
In a scanning electron microscope, voltage applied to the secondary electron detector for detection of secondary electrons released from a specimen bombarded with a primary electron beam is automatically changed in compliance with the change of acceleration voltage for the primary electron beam to ensure that even when the primary electron beam acceleration voltage changes over a wide range, intensity of a permeant electric field in the primary electron beam path which is created by the secondary electron attraction voltage applied to the secondary electron detector can always be controlled automatically such that deflection of the primary electron beam effected by the permeant field is negligible or almost zeroed. Even in the event that the primary electron beam acceleration voltage changes greatly, the primary electron beam will not undergo unwanted deflection due to the permeant field and degradation in resolution of secondary electron images can be prevented.

REFERENCES:
patent: 3792263 (1974-02-01), Hashimoto et al.
patent: 4596929 (1956-06-01), Coates et al.
patent: 4658136 (1987-04-01), Ohtaka

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