Photosensitive composition containing an aliphaticamine

Details Photosensitive composition containing an aliphaticamine Photosensitive composition containing an aliphaticamine

1997-06-03

1999-11-09

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430170, G03F 7039

Patent

active

059811390

ABSTRACT:
A photosensitive composition is provided which prevents deactivation of photosensitive compounds contained therein to provide accurate photoresist pattern shapes. The photosensitive compositions include a photosensitive acid generator, a polyhydroxy-functional resin component and an aliphatic amine. In a preferred embodiment, the photosensitive compositions also may include a bridging agent. The photosensitive compositions preferably contain the aliphatic amine(s) in an amount of from about 0.01% to about 1.0% by weight, based upon the weight of the overall photosensitive composition.

REFERENCES:
patent: 5498506 (1996-03-01), Wengenroth et al.
patent: 5738972 (1998-04-01), Padmanaban et al.

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