Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen
Patent
1998-03-04
1999-11-09
Noori, Max
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
By loading of specimen
73849, G01L 124, G01M 900
Patent
active
059792442
ABSTRACT:
Methods and apparatus for evaluating internal film stress on a sample at high lateral resolutions are provided. The sample comprises at least one material and has a planar or smooth surface. To determine internal stress, a calibration curve correlating a set of first ellipsometric parameter amplitudes to a set of first stress values is generated. One first stress value is correlated to one first ellipsometric amplitude. Then, the sample for which stress is to be determined is rotated as a function of sample rotation angle a and is measured for a set of second ellipsometric parameter at a selected area of the sample to determine a second ellipsometric amplitude. The internal stress at the selected area of the sample is then determined from the calibration curve by using the second ellipsometric amplitude as an index to determine a corresponding stress value from the calibration curve.
REFERENCES:
patent: 4841778 (1989-06-01), Butler et al.
patent: 5232547 (1993-08-01), Drowley et al.
patent: 5546811 (1996-08-01), Rogers et al.
patent: 5864393 (1999-01-01), Maris
Braden Stanton C.
Noori Max
Siemens Aktiengesellschaft
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