Method of forming metal surface thin film having high corrosion

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156646, 156665, 2041923, 427 38, 427309, B44C 122, C23F 100, C23C 1400, C23C 1432

Patent

active

050247212

ABSTRACT:
The present invention provides a method of forming metal surface thin film having high corrosion resistance and high adhesion by carrying out sequentially the following steps a) through c): a) an etching step carried out by applying a negative D.C. voltage to a metal substrate inside an apparatus having an inert gas atmosphere; b) an oxide film formation step for forming an oxide film by generating an oxygen plasma inside an apparatus having an oxygen gas atmosphere and applying a positive voltage to the surface of the metal substrate; and c) a durable film formation step for forming a durable film by vapor phase deposition of a corrosion-resistant material onto the surface of the metal substrate inside the apparatus having inert gas atmosphere. In the formation method of the present invention, since the oxide film is formed between metal substrate and the durable film, the metal surface thin film exhibits a very high corrosion resistance.

REFERENCES:
patent: 3829969 (1974-08-01), Fischbein et al.
patent: 4428812 (1984-01-01), Sproul

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